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Field Service Engineer - Plasma Technology Why Oxford Instruments? Our purpose is to accelerate the breakthroughs that create a brighter future for our world. Our technology and scientific expertise enable our customers …
Skills: Plasma Etch, Deposition Systems, Vacuum Technology, RF Power Systems, Electrical Troubleshooting
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Lexington, Massachusetts, United States · Hybrid
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Lexington, Massachusetts, United States · On-site
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Waltham, Massachusetts, United States · Hybrid
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Natick, Massachusetts, United States · Hybrid
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Hanson, Massachusetts, United States · On-site
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Boston, Massachusetts, United States · On-site
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Deliver technical support, installation, and maintenance for plasma etch and deposition systems at customer sites. Perform complex troubleshooting, system calibrations, and provide technical training to ensure optimal system reliability.
Requires a Bachelor's degree in Engineering or Physics (or equivalent experience) and 3-5 years of semiconductor field service experience. Must be physically capable of lifting 50 lbs and available for extensive weekday travel.
Field Service Engineer - Plasma Technology
Our purpose is to accelerate the breakthroughs that create a brighter future for our world. Our technology and scientific expertise enable our customers to discover and bring to market exciting new advances that drive human progress. We aim to be the scientific instrumentation partner in every significant lab and production facility across the world. Our people and culture are vital to our success. We strive to offer the opportunities that will attract, engage, motivate and develop the very best talent. This involves creating an inclusive environment and culture where difference is valued and people are recognised for what they deliver and bring to the team.
We want to empower our employees so that they innovate, support our growth and improve our productivity. We support them to make the right decisions and reach their full potential as they develop their careers at OI. Our ways of working are lived every day and are as follows:
Applicants must be authorized to work for ANY employer in the US. We are unable to sponsor or take over sponsorship of employment Visa at this time.
Location
REMOTE – North America -based –California, USA (Bay Area) . Candidates must reside within reasonable travel time (typically 60 minutes) of a major airport to support frequent weekday travel to customer sites.
The Role
Represent Oxford Instruments by delivering world-class technical support, installation, and maintenance for plasma etch and deposition systems (e.g., PlasmaPro, FlexAL, Estrelas etcher). This role demands a hands-on problem solver with strong technical acumen, clear communication skills, and a proactive mindset. You’ll collaborate across teams, escalate issues when needed, and maintain detailed documentation to support continuous improvement. With extensive travel across customer sites, you’ll play a critical role in driving customer satisfaction and advancing cutting-edge semiconductor technologies.
Key Responsibilities
• Preventive & Corrective Maintenance Execute scheduled and emergency maintenance with precision. Diagnose root causes beyond surface-level symptoms and validate repairs against stringent vacuum tolerances, leak-up rates, and process benchmarks.
• Customer Engagement & Technical Training Build trust and long-term relationships through responsive communication and hands-on training. Empower customers to operate and maintain systems confidently across key processes.
• Advanced Troubleshooting Resolve complex hardware, and software issues using specialized tools (vacuum leak detectors, RF power meters, DVMs, LCR meters, multimeters). Provide remote support when needed to minimize downtime and maximize uptime.
• Calibration & System Upgrades Calibrate critical components (AMUs, RF Generators, APCs, MFCs) and implement performance-enhancing upgrades (turbo pumps, PLCs, breakers) to ensure optimal system reliability and throughput.
Required Qualifications & Experience• Education & Industry Background
o Bachelor’s degree in Electrical Engineering, Mechanical Engineering, Physics, or a related technical field.
o Equivalent hands-on experience in semiconductor equipment service may substitute.
o 3–5 years of field service experience in the semiconductor industry, with a focus on plasma etch and deposition systems.
o Familiarity with cleanroom operations and safety protocols.
• Vacuum & Power Systems
o Hands-on experience with vacuum technologies: turbo pumps, cryo pumps, roughing pumps.
o Skilled in troubleshooting 208V electrical systems and 24V control subsystems
Experience with RF power components and pneumatically driven
• Diagnostics & Technical Toolso Proficient with diagnostic instruments:
Vacuum leak detectors
RF power meters
DVMs, LCR meters, multimeters, megohm meters
o Ability to read and interpret mechanical, pneumatic, and electrical schematics and plumbing diagrams.• Process Knowledgeo Strong understanding of RF theory and inductively coupled plasma (ICP) systems.
o Familiarity with semiconductor processes: RIE, PECVD, ICP, ALD.• Physical & Travel Requirementso Hold a valid driver’s license and safe driving record, passport, and ability to travel independently.
o Must be physically agile and comfortable working in confined or awkward spaces.
o Capable of independently lifting and handling equipment weighing up to 50 lbs.
o Able to commit to extensive weekday travel to support customer installations and service needs, Monday through Friday
Preferred Skills & Attributes• Platform & Component Experienceo Experience with Brooks platforms, Pfeiffer/Edwards pumping systems, and MKS components.
o Knowledge of calibration and optimization of APCs and MFCs.
• Work Ethic & Collaborationo Strong manual dexterity and ability to maintain a clean, organized workspace in cleanroom attire.o Proactive problem-solving and openness to continuous learning.
o Effective communicator with strong listening skills.
o Adaptable to evolving technologies and customer needs.
o Comfortable working independently or as part of a team.
What Sets You Apart: Commitment to Service Excellence
• Passion for solving complex technical challenges with precision and care.
• Proactive in anticipating customer needs and delivering timely, high-quality solutions.
• Builds trust through clear communication and confident issue resolution.
• Eager to learn, grow, and collaborate to uphold the highest standards of service
In accordance with Massachusetts law, the expected salary for this full-time, benefited position is between $52.88/hr - $60.096/hr. The actual compensation will be determined considering factors such as relevant skills and experience and other factors permitted by law.
#LI-NS1
Oxford Instruments is a leading provider of high technology tools and systems for research and industry. We design and manufacture equipment that can fabricate, analyse and manipulate matter at the atomic and molecular level. Our purpose is to accelerate the breakthroughs that create a brighter future for our world.
Offices: Halifax Road, High Wycombe, England HP12 3, GB · 300 Baker Ave, Suite 140, Concord, MA 01742, US · Borsigstraße 15a, Wiesbaden, Hesse 65205, DE · Govier Way, Western Approach Distribution Park, Severn Beach, England BS35 4GG, GB · 360 El Pueblo Rd, Scotts Valley, California 95066, US
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